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ICIP 2022 - The International Conference on Image Processing (ICIP), sponsored by the IEEE Signal Processing Society, is the premier forum for the presentation of technological advances and research results in the fields of theoretical, experimental, and applied image and video processing. ICIP has been held annually since 1994, brings together leading engineers and scientists in image and video processing from around the world. Visit website.

This paper addresses the problem of defect segmentation in semiconductor manufacturing. The input of our segmentation is a scanning-electron-microscopy (SEM) image of the candidate defect region. We train a U-net shape network to segment defects using a dataset of clean background images. The samples of the training phase are produced automatically such that no manual labeling is required. To enrich the dataset of clean background samples, we apply defect implant augmentation. To that end, we apply a copy-and-paste of a random image patch in the clean specimen.

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